JPH0174508U - - Google Patents
Info
- Publication number
- JPH0174508U JPH0174508U JP1987169985U JP16998587U JPH0174508U JP H0174508 U JPH0174508 U JP H0174508U JP 1987169985 U JP1987169985 U JP 1987169985U JP 16998587 U JP16998587 U JP 16998587U JP H0174508 U JPH0174508 U JP H0174508U
- Authority
- JP
- Japan
- Prior art keywords
- light
- slit
- shutter
- dimensional position
- slits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169985U JPH0174508U (en]) | 1987-11-06 | 1987-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169985U JPH0174508U (en]) | 1987-11-06 | 1987-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0174508U true JPH0174508U (en]) | 1989-05-19 |
Family
ID=31460532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987169985U Pending JPH0174508U (en]) | 1987-11-06 | 1987-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0174508U (en]) |
-
1987
- 1987-11-06 JP JP1987169985U patent/JPH0174508U/ja active Pending